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"Fabrication of high performance AlGaN/GaN FinFET by utilizing anisotropic ..."
Dong-Hyeok Son et al. (2015)
- Dong-Hyeok Son, Young-woo Jo, Ryun-Hwi Kim, Chan Heo, Jae Hwa Seo, Jin Su Kim, In Man Kang, Sorin Cristoloveanu, Jung-Hee Lee:
Fabrication of high performance AlGaN/GaN FinFET by utilizing anisotropic wet etching in TMAH solution. ESSDERC 2015: 130-133
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