"MEMS optical microphone based on light phase modulation."

Niccolò de Milleri et al. (2022)

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DOI: 10.1109/ESSDERC55479.2022.9947112

access: closed

type: Conference or Workshop Paper

metadata version: 2024-08-04

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Niccolò de Milleri, Güclü Onaran, Andreas Wiesbauer, Andrea Baschirotto:
MEMS optical microphone based on light phase modulation. ESSDERC 2022: 289-292

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