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"Mechanical Band Gap Formation in Anisotropic CMOS Back-End-of-Line Stacks ..."

Richard Hudeczek, Peter Baumgartner (2021)

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DOI: 10.1109/ESSDERC53440.2021.9631769

access: closed

type: Conference or Workshop Paper

metadata version: 2021-12-24

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Richard Hudeczek, Peter Baumgartner:
Mechanical Band Gap Formation in Anisotropic CMOS Back-End-of-Line Stacks for Monolithic High-Q MEMS Resonator Confinement. ESSDERC 2021: 211-214

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