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"Integrated Circuits as Key Enabler for today's Smart MEMS Sensors."
Dirk Droste et al. (2022)
- Dirk Droste, Horst Symanzik, Timo Gießelmann, Markus Ulm, Ivano Galdi, Riccardo Campagna:
Integrated Circuits as Key Enabler for today's Smart MEMS Sensors. ESSCIRC 2022: 12-16
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