"Migrating from planar to FinFET for further CMOS scaling: SOI or bulk?"

Thomas Chiarella et al. (2009)

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DOI: 10.1109/ESSCIRC.2009.5325993

access: closed

type: Conference or Workshop Paper

metadata version: 2024-01-15

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Thomas Chiarella, Liesbeth Witters, Abdelkarim Mercha, Christoph Kerner, Rok Dittrich, Michal Rakowski, Claude Ortolland, Lars-Åke Ragnarsson, Bertrand Parvais, An De Keersgieter, Stefan Kubicek, Augusto Redolfi, R. Rooyackers, C. Vrancken, S. Brus, A. Lauwers, Philippe Absil, S. Biesemans, Thomas Y. Hoffmann:
Migrating from planar to FinFET for further CMOS scaling: SOI or bulk? ESSCIRC 2009: 84-87

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