"A 3-axis PZT-based MEMS gyroscope in 0.18μm CMOS."

Imran Ahmed et al. (2012)

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DOI: 10.1109/ESSCIRC.2012.6341303

access: closed

type: Conference or Workshop Paper

metadata version: 2020-08-26

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Imran Ahmed, David Halupka, Bertram Leesti, James A. Cherry, Robert McKenzie, Alireza Nilchi, Hamed Mazhab-Jafari, W. Martin Snelgrove, Raymond Chik:
A 3-axis PZT-based MEMS gyroscope in 0.18μm CMOS. ESSCIRC 2012: 241-244

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