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"Preparation of titanium oxides films by CVD in O2-N2 atmosphere."

Liping Sun et al. (2011)

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DOI: 10.1109/EMEIT.2011.6023460

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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Liping Sun, Rong Deng, Yuan Yuan, Huiqiu Deng:
Preparation of titanium oxides films by CVD in O2-N2 atmosphere. EMEIT 2011: 1829-1831

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