"Customized Thinning of Silicon-based Neural Probes Down to 2 µm."

Elisabeth Otte et al. (2020)

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DOI: 10.1109/EMBC44109.2020.9176523

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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Elisabeth Otte, Valerian Cziumplik, Patrick Ruther, Oliver Paul:
Customized Thinning of Silicon-based Neural Probes Down to 2 µm. EMBC 2020: 3388-3392

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