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"Multi-layered poly-dimethylsiloxane as a non-hermetic packaging material ..."

Shem Lachhman, Christian A. Zorman, Wen H. Ko (2012)

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DOI: 10.1109/EMBC.2012.6346264

access: closed

type: Conference or Workshop Paper

metadata version: 2021-04-09

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  - conf/embc/LachhmanZK12
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Shem Lachhman, Christian A. Zorman, Wen H. Ko:
Multi-layered poly-dimethylsiloxane as a non-hermetic packaging material for medical MEMS. EMBC 2012: 1655-1658

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