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"Process development for dry etching polydimethylsiloxane for neural ..."

Melissa P. Anenden et al. (2011)

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DOI: 10.1109/IEMBS.2011.6090817

access: closed

type: Conference or Workshop Paper

metadata version: 2021-12-24

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Melissa P. Anenden, Martin J. Svehla, Nigel H. Lovell, Gregg J. Suaning:
Process development for dry etching polydimethylsiloxane for neural electrodes. EMBC 2011: 2977-2980

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