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"Improved metrology of implant lines on static images of textured silicon ..."

Kuldeep Shah, Eli Saber, Kevin Verrier (2015)

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DOI: 10.1117/12.2084525

access: closed

type: Conference or Workshop Paper

metadata version: 2023-07-31

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  - conf/ei-ipmva/ShahSV15
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  - https://dblp.org/rec/conf/ei-ipmva/ShahSV15
Kuldeep Shah, Eli Saber, Kevin Verrier:
Improved metrology of implant lines on static images of textured silicon wafers using line integral method. Image Processing: Machine Vision Applications 2015: 94050F

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