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"Study on Temperature Control Model and Algorithm for the Discharge Cavity ..."

Yan He et al. (2021)

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DOI: 10.1145/3478905.3478957

access: closed

type: Conference or Workshop Paper

metadata version: 2021-09-29

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Yan He, Longwei Sun, Xiaoping Li, Hongfei Nie:
Study on Temperature Control Model and Algorithm for the Discharge Cavity of Excimer Laser. DSIT 2021: 260-267

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