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"Top-gated atomic precision phosphorous doped silicon single electron ..."
Evan M. Anderson et al. (2019)
- Evan M. Anderson
, Leon Maurer, Lisa A. Tracy, S. W. Smith, Ping Lu, Aaron M. Katzenmeyer, Andrew D. Baczewski
, DeAnna M. Campbell, Michael T. Marshall, Dan R. Ward, Tzu-Ming Lu, Shashank Misra:
Top-gated atomic precision phosphorous doped silicon single electron transistor with low thermal budget gate dielectric. DRC 2019: 205-206
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