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"Cut mask optimization for multi-patterning directed self-assembly lithography."

Wachirawit Ponghiran, Seongbo Shim, Youngsoo Shin (2017)

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DOI: 10.23919/DATE.2017.7927228

access: closed

type: Conference or Workshop Paper

metadata version: 2017-08-14

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  dblp key:
  - conf/date/PonghiranSS17
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  persistent URL:
  - https://dblp.org/rec/conf/date/PonghiranSS17
Wachirawit Ponghiran, Seongbo Shim, Youngsoo Shin:
Cut mask optimization for multi-patterning directed self-assembly lithography. DATE 2017: 1498-1503

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