"A Method of Predicting the Deposited Film Thickness in IC Fabrication ..."

Jiangchen Wu, Yumeng Shi, Yining Chen (2023)

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DOI: 10.1145/3638584.3638630

access: closed

type: Conference or Workshop Paper

metadata version: 2024-04-01

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Jiangchen Wu, Yumeng Shi, Yining Chen:
A Method of Predicting the Deposited Film Thickness in IC Fabrication Based on Stacking Ensemble Learning. CSAI 2023: 467-474

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