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"Multi-functional Monolithic-MEMS Tactile Imager Using Flexible Deformation ..."

Hidekuni Takao et al. (2007)

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DOI: 10.1109/CICC.2007.4405697

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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  - conf/cicc/TakaoYKSI07
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Hidekuni Takao, Masaki Yawata, Ryo Kodama, Kazuaki Sawada, Makoto Ishida:
Multi-functional Monolithic-MEMS Tactile Imager Using Flexible Deformation of Silicon IC. CICC 2007: 131-134

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