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"Progress and outlook of lithography for semiconductor IC."

Burn J. Lin, R. G. Liu (2009)

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DOI: 10.1109/CICC.2009.5280903

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Burn J. Lin, R. G. Liu:
Progress and outlook of lithography for semiconductor IC. CICC 2009: 133-140

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