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"A 0.5 mm2 integrated capacitive vibration sensor with sub-10 ..."
Sitaraman V. Iyer et al. (2005)
- Sitaraman V. Iyer, Hasnain Lakdawala, Rajarishi S. Sinha, Eric J. Zacherl, Richard T. Unetich, Daniel M. Gaugel, David F. Guillou, L. Richard Carley:
A 0.5 mm2 integrated capacitive vibration sensor with sub-10 zF/rt-Hz noise floor. CICC 2005: 93-96
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