"Multi-objective H_∞ control applied to a wafer stage model."

M. J. Zandvliet et al. (2004)

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DOI: 10.1109/CDC.2004.1428763

access: closed

type: Conference or Workshop Paper

metadata version: 2022-01-18

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M. J. Zandvliet, Carsten W. Scherer, Camile W. J. Hol, Marc M. J. van de Wal:
Multi-objective H_∞ control applied to a wafer stage model. CDC 2004: 796-802

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