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"Simultaneous regulation of film thickness, surface roughness and porosity ..."
Gangshi Hu et al. (2009)
- Gangshi Hu, Xinyu Zhang, Gerassimos Orkoulas, Panagiotis D. Christofides:
Simultaneous regulation of film thickness, surface roughness and porosity in a multiscale thin film growth process. CDC 2009: 2387-2394
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