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"Fourth-Order Reference Trajectories in Lithography Stages with ..."

Marcel Heertjes, Jazmin Zenteno Torres, Mohammad Al Janaideh (2023)

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DOI: 10.1109/CDC49753.2023.10384162

access: closed

type: Conference or Workshop Paper

metadata version: 2024-01-29

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  - conf/cdc/HeertjesTJ23
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Marcel Heertjes, Jazmin Zenteno Torres, Mohammad Al Janaideh:
Fourth-Order Reference Trajectories in Lithography Stages with Weakly-Damped Modes - a Frequency-Domain Perspective. CDC 2023: 8696-8701

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