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"Integration of scheduling and advanced process control in semiconductor ..."

Claude Yugma et al. (2014)

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DOI: 10.1109/COASE.2014.6899310

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-30

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Claude Yugma, Jakey Blue, Stéphane Dauzère-Pérès, Philippe Vialletelle:
Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook. CASE 2014: 93-98

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