"Collaborative Scheduling of Start-up Transient Process for Cluster Tools ..."

Mingyao Li, Wenqing Xiong, Chunrong Pan (2025)

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DOI: 10.1109/CASE58245.2025.11163803

access: closed

type: Conference or Workshop Paper

metadata version: 2025-09-30

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Mingyao Li, Wenqing Xiong, Chunrong Pan:
Collaborative Scheduling of Start-up Transient Process for Cluster Tools with Equipment Front-End Module. CASE 2025: 3480-3485

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