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"Contact layer decomposition to enable DSA with multi-patterning technique ..."

Zigang Xiao et al. (2016)

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DOI: 10.1109/ASPDAC.2016.7427995

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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  - conf/aspdac/XiaoLWZ16
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Zigang Xiao, Chun-Xun Lin, Martin D. F. Wong, Hongbo Zhang:
Contact layer decomposition to enable DSA with multi-patterning technique for standard cell based layout. ASP-DAC 2016: 95-102

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