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"Mask optimization for directed self-assembly lithography: Inverse DSA and ..."

Seongbo Shim, Youngsoo Shin (2016)

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DOI: 10.1109/ASPDAC.2016.7427993

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-26

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Seongbo Shim, Youngsoo Shin:
Mask optimization for directed self-assembly lithography: Inverse DSA and inverse lithography. ASP-DAC 2016: 83-88

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