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"Process Optimization for CMOS Compatible MEMS Capacitive Acoustic Sensor."

Ming Li, Xiaoxu Kang, Xiaolan Zhong (2021)

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DOI: 10.1109/ASICON52560.2021.9620398

access: closed

type: Conference or Workshop Paper

metadata version: 2021-12-06

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  dblp key:
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Ming Li, Xiaoxu Kang, Xiaolan Zhong:
Process Optimization for CMOS Compatible MEMS Capacitive Acoustic Sensor. ASICON 2021: 1-3

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