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"Development and characterization of TaN thin film resistor with CMOS ..."
Xiaoxu Kang et al. (2017)
- Xiaoxu Kang, Limin Zhu, Xingwang Zhu, Qingyun Zuo, Xiaolan Zhong, Shoumian Chen, Yuhang Zhao, Shanshan Liu, Hanwei Lu, Jianmin Wang, Wei Wang, Bo Zhang:
Development and characterization of TaN thin film resistor with CMOS compatible fabrication process. ASICON 2017: 160-162
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