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"Development and Characterization of High Temperature Plasma Nitridation ..."
Xiaoxu Kang et al. (2021)
- Xiaoxu Kang, Xiaolan Zhong, Zhangfa Chen, Zhengkai Dao, Qiang Zhang, Hao Wan, Yamin Zhou, Ming Li, Yingjia Guo, Ran Nie, Tao Wu:
Development and Characterization of High Temperature Plasma Nitridation Process for Advanced CMOS Technology Application. ASICON 2021: 1-3
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