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"Using Data Mining Techniques in Development of MURA Geometric Prediction ..."

Wen-Hsing Kao, Jason C. Hung, Victoria Hsu (2008)

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DOI: 10.1109/APSCC.2008.76

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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  - https://dblp.org/rec/conf/apscc/KaoHH08
Wen-Hsing Kao, Jason C. Hung, Victoria Hsu:
Using Data Mining Techniques in Development of MURA Geometric Prediction Module for Large Area Photomask. APSCC 2008: 957-962

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