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"Process simulation of Trench Gate and Plate and Trench Drain SOI NLIGBT ..."

Haipeng Zhang et al. (2008)

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DOI: 10.1109/APCCAS.2008.4746201

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Haipeng Zhang, Lingling Sun, Lifei Jiang, Lijian Ma, Mi Lin:
Process simulation of Trench Gate and Plate and Trench Drain SOI NLIGBT with TCAD tools. APCCAS 2008: 1037-1040

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