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"Simulation of equipment design optimisation in microelectronics manufacturing."

C. H. Tong, Juan C. Meza, Chris D. Moen (1997)

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DOI: 10.1109/SIMSYM.1997.586498

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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C. H. Tong, Juan C. Meza, Chris D. Moen:
Simulation of equipment design optimisation in microelectronics manufacturing. Annual Simulation Symposium 1997: 92-101

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