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"On intermittent-contact mode sensing using electrostatically-actuated ..."
Deepak R. Sahoo et al. (2008)
- Deepak R. Sahoo
, Walter Häberle, Peter Bächtold, Abu Sebastian
, Haralampos Pozidis, Evangelos Eleftheriou:
On intermittent-contact mode sensing using electrostatically-actuated micro-cantilevers with integrated thermal sensors. ACC 2008: 2034-2039
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