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"Feedforward control of a piezoelectric flexure stage for AFM."

Yang Li, John Bechhoefer (2008)

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DOI: 10.1109/ACC.2008.4586901

access: closed

type: Conference or Workshop Paper

metadata version: 2020-07-09

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Yang Li, John Bechhoefer:
Feedforward control of a piezoelectric flexure stage for AFM. ACC 2008: 2703-2709

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