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"Stability analysis of double EWMA run-to-run control with metrology delay."

Richard Good, S. Joe Qin (2002)

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DOI: 10.1109/ACC.2002.1023956

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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Richard Good, S. Joe Qin:
Stability analysis of double EWMA run-to-run control with metrology delay. ACC 2002: 2156-2161

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