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"Micro-Positioning End-Stage for Precise Multi-Axis Motion Control in ..."

Yazan Mohammad Al-Rawashdeh et al. (2021)

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DOI: 10.23919/ACC50511.2021.9483343

access: closed

type: Conference or Workshop Paper

metadata version: 2021-07-30

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  dblp key:
  - conf/amcc/Al-RawashdehAHJ21
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Yazan Mohammad Al-Rawashdeh, Mahmoud Al-Tamimi, Marcel Heertjes, Mohammad Al Janaideh:
Micro-Positioning End-Stage for Precise Multi-Axis Motion Control in Optical Lithography Machines: Preliminary Results. ACC 2021: 40-47

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