"Friction compensation for Nanopositioning and Nanomeasuring Machines."

Arvid Amthor, Stephan Zschäck, Christoph Ament (2010)

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DOI: 10.1109/AMC.2010.5464105

access: closed

type: Conference or Workshop Paper

metadata version: 2019-01-23

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Arvid Amthor, Stephan Zschäck, Christoph Ament:
Friction compensation for Nanopositioning and Nanomeasuring Machines. AMC 2010: 7-12

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