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"Self-sensing electrostatic drive in a MEMS nanopositioner for the ..."

Steven Ian Moore, S. O. Reza Moheimani (2014)

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DOI: 10.1109/AIM.2014.6878288

access: closed

type: Conference or Workshop Paper

metadata version: 2020-06-15

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Steven Ian Moore, S. O. Reza Moheimani:
Self-sensing electrostatic drive in a MEMS nanopositioner for the application of vibration control. AIM 2014: 1458-1463

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