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"Precision motion control of a linear piezoelectric ultrasonic motor stage."

Wenyu Liang et al. (2013)

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DOI: 10.1109/AIM.2013.6584086

access: closed

type: Conference or Workshop Paper

metadata version: 2021-03-08

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Wenyu Liang, Sunan Huang, Si-Lu Chen, Kok Kiong Tan:
Precision motion control of a linear piezoelectric ultrasonic motor stage. AIM 2013: 164-169

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