"Two-axis MEMS scanning mirror driven by a single PZT actuator."

Chung-De Chen, Yu-Jen Wang, Chien-Hsien Yeh (2014)

Details and statistics

DOI: 10.1109/AIM.2014.6878255

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

a service of  Schloss Dagstuhl - Leibniz Center for Informatics