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"Conductive behavior modeling of dual-axis CMOS MEMS convective ..."

Brahim Mezghani et al. (2013)

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DOI: 10.1109/SSD.2013.6564151

access: closed

type: Conference or Workshop Paper

metadata version: 2024-07-10

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Brahim Mezghani, Fares Tounsi, H. Yaich, M. Masmoudi:
Conductive behavior modeling of dual-axis CMOS MEMS convective accelerometers using 3D FEM and spherical model. SSD 2013: 1-6

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