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"The dependency of TSV keep-out zone (KOZ) on Si crystal direction and ..."
Jiye Zhang et al. (2013)
- Jiye Zhang, Lin Zhang, Yuanwei Dong, Hongyu Li, Cher Ming Tan, Guangrui Xia, Chuan Seng Tan
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The dependency of TSV keep-out zone (KOZ) on Si crystal direction and liner material. 3DIC 2013: 1-5
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