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"Vacuum-assisted-spin-coating of polyimide liner for high-aspect-ratio TSVs ..."

Yangyang Yan et al. (2015)

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DOI: 10.1109/3DIC.2015.7334568

access: closed

type: Conference or Workshop Paper

metadata version: 2021-02-16

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  dblp key:
  - conf/3dic/YanDCLFK15
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Yangyang Yan, Yingtao Ding, Qianwen Chen, Kang Wook Lee, Takafumi Fukushima, Mitsumasa Koyanagi:
Vacuum-assisted-spin-coating of polyimide liner for high-aspect-ratio TSVs applications. 3DIC 2015: TS5.2.1-TS5.2.5

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