"Effects of Argon and Nitrogen ion Bombardments on Sputtered and ..."

Han Kyeol Seo, Hae-Sung Park, Sarah Eunkyung Kim (2019)

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DOI: 10.1109/3DIC48104.2019.9058789

access: closed

type: Conference or Workshop Paper

metadata version: 2020-04-19

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Han Kyeol Seo, Hae-Sung Park, Sarah Eunkyung Kim:
Effects of Argon and Nitrogen ion Bombardments on Sputtered and Electroplated Cu Surfaces for Cu Bonding Application. 3DIC 2019: 1-4

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