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"Thermal stability of electroplated copper thin-film interconnections."

Pornvitoo Rittinon, Ken Suzuki, Hideo Miura (2015)

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DOI: 10.1109/3DIC.2015.7334560

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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  - conf/3dic/RittinonSM15
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Pornvitoo Rittinon, Ken Suzuki, Hideo Miura:
Thermal stability of electroplated copper thin-film interconnections. 3DIC 2015: TS4.2.1-TS4.2.6

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