"Pre bonding metrology solutions for 3D integration."

Gregory Riou et al. (2010)

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DOI: 10.1109/3DIC.2010.5751484

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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Gregory Riou, Gweltaz Gaudin, Didier Landru, Catherine Tempesta, Ionut Radu, Mariam Sadaka, Kevin Winstel, Emily Kinser, Robert Hannon, Boris V. Kamenev, Michael Darwin, Robert Sachs:
Pre bonding metrology solutions for 3D integration. 3DIC 2010: 1-5

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