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"Heterogeneous integration technology for MEMS-LSI multi-chip module."
Kang Wook Lee et al. (2009)
- Kang Wook Lee, Shigeyuki Kanno, Yuki Ohara, Kouji Kiyoyama, Ji Chel Bea, Takafumi Fukushima
, Tetsu Tanaka
, Mitsumasa Koyanagi:
Heterogeneous integration technology for MEMS-LSI multi-chip module. 3DIC 2009: 1-6
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