"Electrical model and characterization of Through Silicon Capacitors (TSC) ..."

Khadim Dieng et al. (2014)

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DOI: 10.1109/3DIC.2014.7152152

access: closed

type: Conference or Workshop Paper

metadata version: 2021-04-09

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Khadim Dieng, Philippe Artillan, Cédric Bermond, Olivier Guiller, Thierry Lacrevaz, Sylvain Joblot, Gregory Houzet, Alexis Farcy, Yann Lamy, Bernard Fléchet:
Electrical model and characterization of Through Silicon Capacitors (TSC) in silicon interposer. 3DIC 2014: 1-8

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