BibTeX record journals/ibmrd/LiebmannMWLLD01

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  author    = {Lars Liebmann and
               Scott M. Mansfield and
               Alfred K. Wong and
               Mark A. Lavin and
               William C. Leipold and
               Timothy G. Dunham},
  title     = {{TCAD} development for lithography resolution enhancement},
  journal   = {{IBM} Journal of Research and Development},
  volume    = {45},
  number    = {5},
  pages     = {651--666},
  year      = {2001}
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