BibTeX record conf/vlsi-dat/Chang14

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@inproceedings{DBLP:conf/vlsi-dat/Chang14,
  author    = {Mei Chang},
  title     = {Precision material engineering - An equipment point of view},
  booktitle = {{VLSI-DAT}},
  pages     = {1--3},
  publisher = {{IEEE}},
  year      = {2014}
}
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