BibTeX record journals/tsmc/WuCCZ13

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@article{DBLP:journals/tsmc/WuCCZ13,
  author       = {Naiqi Wu and
                  Feng Chu and
                  Chengbin Chu and
                  MengChu Zhou},
  title        = {Petri Net Modeling and Cycle-Time Analysis of Dual-Arm Cluster Tools
                  With Wafer Revisiting},
  journal      = {{IEEE} Trans. Syst. Man Cybern. Syst.},
  volume       = {43},
  number       = {1},
  pages        = {196--207},
  year         = {2013},
  url          = {https://doi.org/10.1109/TSMCA.2012.2187890},
  doi          = {10.1109/TSMCA.2012.2187890},
  timestamp    = {Mon, 30 Jan 2023 15:29:03 +0100},
  biburl       = {https://dblp.org/rec/journals/tsmc/WuCCZ13.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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